基于PC的LED外延片無損檢測掃描系統(tǒng)

介紹了對新型發(fā)光二極管外延片光致發(fā)光系統(tǒng)的改進，以VC.net 為語言工具編制軟
件，對發(fā)光二極管外延片關(guān)鍵性能參數(shù)的測量結(jié)果進行分析。增加了薄膜厚度測量的性能，完善了測量系統(tǒng)的功能?；赑C 的檢測系統(tǒng)智能化、自動化，實現(xiàn)了對LED 外延片的無損、快速、準(zhǔn)確的在線掃描測量。
關(guān)鍵詞：外延片檢測；光致發(fā)光；白光干涉法

PC-based LED Epi-wafers NDT scanning system Dong Zhanmin Li Shaolin Sun Hongsan (Department of Physics, Tsinghua University, Beijing 100084, China) Abstract: A new smart LED epi-wafers nondestructive scanning system that based on PC was introduced. Using software to analyze, the measurement results of epi-wafers’ key performance parameters could be got immediately. The function of film thickness measurement was added to the system. This PC-based intelligent system could realize LED wafer nondestructive, rapid and accurate on-line scanning.
Key words: Epi-wafers test; Photoluminescence; White light interference