快速循環(huán)熱處理對(Co0.35Fe0.65)99O1薄膜磁性

針對(Co0.35Fe0.65)99O1薄膜，研究了兩種不同熱處理工藝對其磁性能的影響。結(jié)果表明：快速循環(huán)熱處理可以改善高磁矩(Co0.35Fe0.65)99O1薄膜磁性能，在450°C幾個快速循環(huán)熱處理后，沉積薄膜的矯頑力從105下降到3 Oe，電阻率下降到
70％，a-Fe(Co)相晶粒尺寸可以減小到15～35 nm，該處理方法較以往的熱處理更能改善軟磁薄膜的性能。
The variation of magnetic properties with new Rapid Recurrent Thermal Annealing (RRTA) has been studied in high moment thin film (Co0.35Fe0.65)99O1. After the rapid recurrent thermal annealing the coercivity as-deposited this thin film decreases from 105 to 3 Oe at 450℃ for several periods of times, their resistivity decreases to 70%, and the size of a-Fe(Co)phase can be reduced to 15～35 nm by analysis. Results show that the method is more effective than other methods to improve the magnetic and electrical properties of (Co0.35Fe0.65)99O1 thin films.