擴散硅壓力傳感器及變送器參數(shù)測試系統(tǒng)

擴散硅壓力傳感器及變送器參數(shù)測試系統(tǒng):　采用具有自校驗和信號調(diào)理功能的24 位ADC ,開發(fā)設(shè)計了一種高精度數(shù)據(jù)采集系統(tǒng). 該系統(tǒng)能對擴散硅壓阻傳感器和變送器的特性參數(shù)進(jìn)行高精度的檢測;同時,亦可對熱電偶等具有毫伏信號輸出的傳感器進(jìn)行檢測和標(biāo)定. 作者闡述了該測試系統(tǒng)的原理和構(gòu)成,介紹了軟硬件設(shè)計.
關(guān)鍵詞: 　測試系統(tǒng); 擴散硅壓阻傳感器; 壓力變送器; 高精度檢測

(1. Dept of Elct Engr ,Xi’an Inst of Tech ,Xi’an 710032 ,China ;2. Xi’an Dongfang Mech Group Company) Abstract : 　A high precision data collection system is designed by using 24 bits ADC which has the function of self - calibration and signal processing. An accurate test for diffuse silicon piezor esistance sensors on pressure transmitters and the transducers like thermocouples , with mV signals outputin can performed with the system. The working principles ,system structure and software design are introduced in this paper.
Key Words : 　test system;diffuse silicon piezoresistance sensor ;pressure transmitter ;high precision test